System-on-Chip Center


RRAM/Sensors/Microfluids Fabrication

In addition to chip design, SoCL cleanroom makes it possible for the lab to innovate on novel devices through in-house microfabrication that demonstrates great potential in emerging memory technologies, especially for medical and AI applications. Moreover, it facilitates developing new fabrication techniques to pattern conductive and transparent flexible electrodes. In addition, SoCL cleanroom enables researchers to develop microfluidic systems for the separation and characterization of cancer cells from blood samples using an in-house developed microdevice.

Some of the significant equipment under this facility are:

  • DC Sputter
  • Spin coater
  • UV exposure system
  • Photolithography system (Dilase KLOE 650)
  • Metal Etchants